MILLIMETER-WAVE MEASUREMENTS OF THE COMPLEX DIELECTRIC-CONSTANT OF ANADVANCED THICK-FILM UV PHOTORESIST

Authors
COLLINS CE MILES RE POLLARD RD STEENSON DP DIGBY JW PARKHURST GM CHAMBERLAIN JM CRONIN NJ DAVIES SR BOWEN JW
Citation
Ce. Collins et al., MILLIMETER-WAVE MEASUREMENTS OF THE COMPLEX DIELECTRIC-CONSTANT OF ANADVANCED THICK-FILM UV PHOTORESIST, Journal of electronic materials, 27(6), 1998, pp. 40-42
Citations number
7
Categorie Soggetti
Engineering, Eletrical & Electronic","Material Science
Journal title
Journal of electronic materials → ACNP
ISSN journal
03615235
Volume
27
Issue
6
Year of publication
1998
Pages
40 - 42
Database
ISI
SICI code
0361-5235(1998)27:6<40:MMOTCD>2.0.ZU;2-W
Abstract
The first measurement of the relative permittivity (E,) and loss tange nt (tan delta) of EPONT(TM) SU-8 advanced thick film ultraviolet photo resist is reported at frequencies between 75-110 GHz (W-band). The pro blems associated with such a measurement are discussed, an error analy sis given, and values of epsilon(r) = 1.725+/-0.08 and tan delta = 0.0 2+/-0.001 are determined.