PROXIMITY EFFECT CORRECTION DATA-PROCESSING SYSTEM FOR ELECTRON-BEAM LITHOGRAPHY (VOL 10, PG 133, 1992)

Authors
LU W TAO JX GU N
Citation
W. Lu et al., PROXIMITY EFFECT CORRECTION DATA-PROCESSING SYSTEM FOR ELECTRON-BEAM LITHOGRAPHY (VOL 10, PG 133, 1992), Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(5), 1993, pp. 1906-1907
Citations number
1
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
11
Issue
5
Year of publication
1993
Pages
1906 - 1907
Database
ISI
SICI code
1071-1023(1993)11:5<1906:PECDSF>2.0.ZU;2-F