FABRICATION OF THIN-FILM WAVE-GUIDE QPM-SHG DEVICES BY DOMAIN-INVERTED LIQUID-PHASE EPITAXY

The ferroelectric domain-inversion phenomenon observed in a liquid-pha se epitaxially grown LiNbO3 was applied as a new fabrication technique of a quasi-phase-matched second-harmonic generation device. A periodi c domain-inverted LiNbO3 thin-film optical waveguide was fabricated by forming a periodic groove structure on a Mg-doped LiNbO3 substrate us ing proton-exchange and selective etching techniques followed by domai n-inverted liquid-phase epitaxy. Generation of blue light with a 440 n m wavelength was demonstrated by first-order quasi-phase matching. (C) 1995 Elsevier Science B.V. All rights reserved.