THICKNESS DISTRIBUTION IN PULSED-LASER DEPOSITED PZT FILMS

The two-dimensional spatial distribution of the thickness of pulsed la ser deposited lead zirconate titanate films has been studied experimen tally as a function of the laser characteristics and ambient oxygen pr essure. The profiles obtained in vacuum are in agreement with a model of adiabatic expansion of the plume with an adiabatic index of the vap or gamma = 5/3 and initial height of the plume 10(-2) mm. An increase in the growth rate and nonmonotonic ''broadening'' of the profiles of the films found with increasing oxygen pressure is shown to correlate well with the change in the sorption kinetics on the substrate surface . (C) 1998 American Vacuum Society. [S0734-2101(98)10604-8].