ACHIEVEMENT OF EXTREMELY HIGH-VACUUM IN AN ELECTROLYTICALLY POLISHED STAINLESS-STEEL VACUUM CHAMBER

Authors
WATANABE S KUROKOUCHI S KATO S AONO M
Citation
S. Watanabe et al., ACHIEVEMENT OF EXTREMELY HIGH-VACUUM IN AN ELECTROLYTICALLY POLISHED STAINLESS-STEEL VACUUM CHAMBER, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(4), 1998, pp. 2711-2717
Citations number
11
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
16
Issue
4
Year of publication
1998
Pages
2711 - 2717
Database
ISI
SICI code
0734-2101(1998)16:4<2711:AOEHIA>2.0.ZU;2-4
Abstract
In order to lower the ultimate pressure of a vacuum chamber, it is nec essary to reduce the outgassing rate from the chamber and to improve t he pumping ability. To reduce the outgassing rate, the chamber surface was treated by electrolytic polishing. The pumping speed was improved by a reduction of gases dissolved in a filament of a titanium sublima tion pump. We succeeded in achieving extremely high vacuum (XHV) of th e order of 10(-11) Pa from atmospheric pressure within one day. XHV wi thout baking was also achieved. (C) 1998 American Vacuum Society. [S07 34-2101(98)06204-6].