Yr. Ge et H. Wiedemeier, TRANSIENT-BEHAVIOR OF HG1-XCDXTE FILM GROWTH ON 3-DEGREES OFF-(100) CDTE SUBSTRATES BY CHEMICAL-VAPOR TRANSPORT, Journal of electronic materials, 27(7), 1998, pp. 891-899
The effects of substrate misorientation on Hg1-xCdxTe films, deposited
on 3 degrees off-(100) CdTe substrates by chemical vapor transport (C
VT), have been studied for the first time using a transient growth tec
hnique. The morphological evolution of Hg1-xCdxTe films deposited on t
he vicinal CdTe substrates at 545 degrees C shows a transition from th
ree-dimensional islands to two-dimensional layer growth. The time and
thickness required for the above morphological transition is about 0.7
5 h and 7 mu m, respectively, under present experimental conditions. T
he pronounced long-range-terrace surface morphology of the Hg1-xCdxTe
films illustrates the strong effects of the misorientation of the CdTe
substrates and of the growth kinetics on the CVT growth of this heter
o-epitaxial system. The transient behavior of the surface morphology,
of the surface composition, and of the growth rate all reveal the infl
uences of the 3 degrees misorientation of the (100) CdTe substrates on
the Hg1-xCdxTe epitaxy. The experimental mass flux results of the Hg1
-xCdxTe-HgI2 CVT system under transient and steady-state conditions ca
n be related to the surface kinetics and to the thermodynamic properti
es of the system. The combined results show that the interface kinetic
s are not fixed in the transient regime and that they are coupled to t
he vapor mass transport.