Y. Bu et al., LASER-ASSISTED CHEMICAL-VAPOR-DEPOSITION OF INN ON SI(100), Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 11(6), 1993, pp. 2931-2937
Laser-assisted chemical vapor deposition of InN on Si(100) using HN3 a
nd trimethyl indium (TMIn) with and without 308-nm photon excitation h
as been studied with x-ray photoelectron spectroscopy (XPS), ultraviol
et photoelectron spectroscopy (UPS), and scanning electron microscopy
(SEM). Without 308-nm excimer laser irradiation, no InN film was built
on the surface under the present low-pressure conditions. When the ph
oton beam was introduced, InN films with In:N atomic ratio of 1.0 +/-
0.1 and a thickness of more than 20 angstrom (the limit of the electro
n escaping depth for the In 3d x-ray photoelectrons) were formed at te
mperatures of 300-700 K. The He II UP spectra taken from these InN fil
ms agree well with the result of a pseudopotential calculation for the
InN valence band. Our XPS measurements indicate a three-dimensional (
3D) island growth of InN on Si(100) at 700 K, which is confirmed by th
e SEM images. Although the SEM images taken from the same samples with
2000 X magnification showed very smooth InN films, InN islands of abo
ut 100 nm in diameter could be clearly observed with a magnification o
f greater-than-or-equal-to 20 000 X. In contrast, the InN film grown a
t 300 K showed valleys of uncovered substrate instead of InN islands.
These uncovered substrate areas, corresponding to about 5% of the surf
ace exposed to the probing x-ray radiation, probably result from incom
plete decomposition of In-C bonds and poor diffusion kinetics at this
temperature. Above 800 K, dissociation and desorption of In- and N- co
ntaining species occurred and thus no InN film was formed on the surfa
ce.