Hj. Lee et al., MATERIAL PROPERTIES AND TRIBOLOGICAL PERFORMANCE OF HYDROGENATED SPUTTER CARBON OVERCOAT ON RIGID DISK, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 11(6), 1993, pp. 3007-3013
The structure and material properties of hydrogenated carbon films wer
e studied and related to their tribological performance. Hydrogenated
carbon films containing a range of 15-50 at. % of hydrogen were fabric
ated by magnetron sputtering using a mixture of argon and hydrocarbon
gases. Raman spectroscopy was used for determining the structure of th
e H-C films. For physical property of H-C films, resistance of the fil
m was measured. Nanohardness and elastic modulus of thin H-C films wer
e also studied by measuring the load and displacement curve. The nanoh
ardness and elastic modulus of H-C films were found to be very close t
o those of diamondlike carbon films fabricated by chemical vapor depos
ition. The stresses of H-C films were obtained by measuring the substr
ate curvature before and after deposition. Thermal expansion coefficie
nts of the H-C films were obtained by measuring the change of stress o
f H-C film deposited on two known substrates as a function of temperat
ure. The accelerated drag and contact start stop tests of H-C films we
re performed in various gas environments and it was found that the bes
t tribological performance was obtained from the H-C overcoat with the
highest hydrogen concentration.