MATERIAL PROPERTIES AND TRIBOLOGICAL PERFORMANCE OF HYDROGENATED SPUTTER CARBON OVERCOAT ON RIGID DISK

Citation
Hj. Lee et al., MATERIAL PROPERTIES AND TRIBOLOGICAL PERFORMANCE OF HYDROGENATED SPUTTER CARBON OVERCOAT ON RIGID DISK, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 11(6), 1993, pp. 3007-3013
Citations number
24
Categorie Soggetti
Physics, Applied
ISSN journal
07342101
Volume
11
Issue
6
Year of publication
1993
Pages
3007 - 3013
Database
ISI
SICI code
0734-2101(1993)11:6<3007:MPATPO>2.0.ZU;2-Y
Abstract
The structure and material properties of hydrogenated carbon films wer e studied and related to their tribological performance. Hydrogenated carbon films containing a range of 15-50 at. % of hydrogen were fabric ated by magnetron sputtering using a mixture of argon and hydrocarbon gases. Raman spectroscopy was used for determining the structure of th e H-C films. For physical property of H-C films, resistance of the fil m was measured. Nanohardness and elastic modulus of thin H-C films wer e also studied by measuring the load and displacement curve. The nanoh ardness and elastic modulus of H-C films were found to be very close t o those of diamondlike carbon films fabricated by chemical vapor depos ition. The stresses of H-C films were obtained by measuring the substr ate curvature before and after deposition. Thermal expansion coefficie nts of the H-C films were obtained by measuring the change of stress o f H-C film deposited on two known substrates as a function of temperat ure. The accelerated drag and contact start stop tests of H-C films we re performed in various gas environments and it was found that the bes t tribological performance was obtained from the H-C overcoat with the highest hydrogen concentration.