L. Struder et al., HIGH-RESOLUTION NON DISPERSIVE-X-RAY SPECTROSCOPY WITH STATE-OF-THE-ART SILICON DETECTORS, Mikrochimica acta (1966), 1998, pp. 11-19
For the European X-ray Multi-Mirror mission (XMM) and the German X-ray
satellite ABRIXAS fully depleted pn-CCDs have been fabricated, enabli
ng high speed, low noise, position resolving X-ray spectroscopy. The d
etector was designed and fabricated with a homogeneously sensitive are
a of 36 cm(2). lit 150 K it has a noise of 5 e(-) rms only, with a rea
dout time for the total focal plane array of 4 ms. The maximum count r
ate for single photon counting is 100,000 cps under flat field conditi
ons. Its position resolution is in the order of 100 mu m. The quantum
efficiency is higher than 90% from carbon K X-rays (272 eV) up to 10 k
eV. In addition, new cylindrical silicon drift detectors have been des
igned, fabricated and tested. They comprise an integrated on-chip ampl
ifier system with continuous reset, on-chip voltage divider, electron
accumulation layer stabilizer, large area, homogeneous radiation entra
nce window and a drain for surface generated leakage current. At count
rates as high as 1,000,000 counts per sec and per cm(2), they still s
how excellent spectroscopic behaviour at room temperature operation. T
hese detector systems were developed for X-ray astronomy, synchrotron
light sources and for X-ray fluorescence analysis applications. All sy
stems are fabricated in planar technology having the detector and ampl
ifiers monolithically integrated on high resistivity silicon.