EPMA STUDIES OF THE GROWTH OF THIN SURFACE-COATINGS PRODUCED BY EVAPORATION

We have studied by electron probe microanalysis (EPMA) the growth of t hin surface layers prepared by evaporation and have compared the exper imental k(d) curves before and after heating the samples with those ca lculated by Monte Carlo simulation. When studying systems of substrate and layer materials forming homogeneous flat films, the correspondenc e of the experimental and calculated k(a) curves (the normalized inten sities of the characteristic x-ray lines of film and substrate materia l, depending on film thickness d) is quite good. However, when forming alloys of these materials, for example by heating the sample, the exp erimental k(d) curve is drastically changed.