Electron transport in pseudomorphically-grown silicon on relaxed (001)
Si1-xGex is investigated using a Monte Carlo (MC) simulation tool. Th
e study includes both electron transport in bulk materials and in nMOS
structures. The bulk MC simulator is based on a multiband analytical
model, ''fitted bands'', representing the features of a realistic ener
gy bandstructure. The investigation includes the study of low- and hig
h-field electron transport characteristics at 77 K and 300 K. Single p
article MC simulations are performed for a strained silicon nMOS struc
ture at room temperature. Both calculations show saturation of mobilit
y enhancement in strained silicon beyond germanium mole fraction of 0.
2.