ON THE IMPROVEMENT IN THERMAL QUENCHING OF LUMINESCENCE IN SIGE SI STRUCTURES GROWN BY MOLECULAR-BEAM EPITAXY/

Citation
Wm. Chen et al., ON THE IMPROVEMENT IN THERMAL QUENCHING OF LUMINESCENCE IN SIGE SI STRUCTURES GROWN BY MOLECULAR-BEAM EPITAXY/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(4), 1998, pp. 1928-1932
Citations number
5
Categorie Soggetti
Physics, Applied","Engineering, Eletrical & Electronic
ISSN journal
10711023
Volume
16
Issue
4
Year of publication
1998
Pages
1928 - 1932
Database
ISI
SICI code
1071-1023(1998)16:4<1928:OTIITQ>2.0.ZU;2-2
Abstract
Thermal quenching of photoluminescence (PL) from SiGe/Si quantum well (QW) structures grown by molecular beam epitaxy is shown to be more se vere when grown at a lower temperature. The mechanism responsible for the thermal quenching of PL is discussed as being due to thermally act ivated nonradiative recombination channels, related to defects in both Si barriers and SiGe QW. Nonradiative defects in Si can be rather eff iciently deactivated by post-growth treatments such as hydrogenation a nd thermal annealing, leading to a significant improvement in the ther mal quenching behavior of PL from single QW structures. Nonradiative d efects in SiGe are found to be thermally stable, on the other hand, ev ident from the experimentally observed minor role played by post-growt h thermal annealing in the thermal quenching of PL from multiple QW st ructures. (C) 1998 American Vacuum Society.