Fr. Zypman et Sj. Eppell, ANALYSIS OF SCANNING FORCE MICROSCOPE FORCE-DISTANCE DATA BEYOND THE HOOKIAN APPROXIMATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(4), 1998, pp. 2099-2101
A new method for obtaining force-distance curves using scanning force
microscopy is suggested. The theoretical justification for this method
is discussed. The method, involving frequency domain measurements of
cantilever motion, is predicted to provide improved force data using s
tandard single point measurement of the cantilever deflection. Shortco
mings of the standard Hookian model that are alleviated by our model a
re discussed. Spectroscopic information and knowledge of the applied f
orce during intermittent contact mode imaging are shown to be more app
ropriately determined using the new method. (C) 1998 American Vacuum S
ociety.