Ce. Inglefield et al., MICROWAVE MODULATED PHOTOLUMINESCENCE USED TO MEASURE SURFACE RECOMBINATION VELOCITIES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(4), 1998, pp. 2328-2333
Microwave modulated photoluminescence (MMPL) is a characterization tec
hnique in which a semiconducting sample is subjected to continuous opt
ical pumping and chopped microwave electric fields. The signal normall
y detected in an MMPL experiment is the change in the photoluminescenc
e (PL) spectrum due to the presence of the microwave electric field, w
hich increases the kinetic energy of the free carriers. We have previo
usly correlated the quenching of the PL signal, as induced by the micr
owaves, with nonradiative recombination at a surface/interface of the
photoexcited volume. In this work, we determine quantitatively surface
recombination velocities through a combined measurement of microwave
induced changes in photoconductivity and in FL. From the change in the
photoconductivity we infer a change in the diffusion constant of free
carriers in the material. The change in diffusion constant, along wit
h the change in luminescent intensity, uniquely determines the surface
recombination velocity of the layer. Results for GaAs layers with bar
e surfaces are presented and the potential usefulness of the technique
to other material systems, including the measurement of properties of
buried interfaces, is discussed. (C) 1998 American Vacuum Society.