MICROWAVE MODULATED PHOTOLUMINESCENCE USED TO MEASURE SURFACE RECOMBINATION VELOCITIES

Citation
Ce. Inglefield et al., MICROWAVE MODULATED PHOTOLUMINESCENCE USED TO MEASURE SURFACE RECOMBINATION VELOCITIES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(4), 1998, pp. 2328-2333
Citations number
15
Categorie Soggetti
Physics, Applied","Engineering, Eletrical & Electronic
ISSN journal
10711023
Volume
16
Issue
4
Year of publication
1998
Pages
2328 - 2333
Database
ISI
SICI code
1071-1023(1998)16:4<2328:MMPUTM>2.0.ZU;2-Y
Abstract
Microwave modulated photoluminescence (MMPL) is a characterization tec hnique in which a semiconducting sample is subjected to continuous opt ical pumping and chopped microwave electric fields. The signal normall y detected in an MMPL experiment is the change in the photoluminescenc e (PL) spectrum due to the presence of the microwave electric field, w hich increases the kinetic energy of the free carriers. We have previo usly correlated the quenching of the PL signal, as induced by the micr owaves, with nonradiative recombination at a surface/interface of the photoexcited volume. In this work, we determine quantitatively surface recombination velocities through a combined measurement of microwave induced changes in photoconductivity and in FL. From the change in the photoconductivity we infer a change in the diffusion constant of free carriers in the material. The change in diffusion constant, along wit h the change in luminescent intensity, uniquely determines the surface recombination velocity of the layer. Results for GaAs layers with bar e surfaces are presented and the potential usefulness of the technique to other material systems, including the measurement of properties of buried interfaces, is discussed. (C) 1998 American Vacuum Society.