MICROELECTRONICS AND NANOMETER STRUCTURES - PROCESSING, MEASUREMENT, AND PHENOMENA - PREFACE

Authors
MELNGAILIS J GAMO K ORLOFF J
Citation
J. Melngailis et al., MICROELECTRONICS AND NANOMETER STRUCTURES - PROCESSING, MEASUREMENT, AND PHENOMENA - PREFACE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(4), 1998, pp. 2438-2438
Citations number
NO
Categorie Soggetti
Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
16
Issue
4
Year of publication
1998
Pages
2438 - 2438
Database
ISI
SICI code
1071-1023(1998)16:4<2438:MANS-P>2.0.ZU;2-L