Mj. Vasile et al., FOCUSED ION-BEAM TECHNOLOGY APPLIED TO MICROSTRUCTURE FABRICATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(4), 1998, pp. 2499-2505
Focused ion beams (FIBs) have found a place in several research thrust
s for the manufacture of mini or micro mechanical objects. This articl
e reports the use of FIB in three distinct applications in microfabric
ation: prototype structures, micron-sized machine tools and microsurgi
cal manipulators, and ion milling of three dimensional features. Examp
les of each of these applications are given with the FIB component ide
ntified as the enabling or critical component in the technology. The p
ossibility of using FIB milling as part of a production method for mic
ron-sized machine tools is discussed, and the mass production conseque
nces of molds fabricated by three dimensional ion beam milling is also
considered. The mathematical procedure and programming steps needed t
o accurately control FIB three dimensional milling are outlined. (C) 1
998 American Vacuum Society.