FOCUSED ION-BEAM TECHNOLOGY APPLIED TO MICROSTRUCTURE FABRICATION

Focused ion beams (FIBs) have found a place in several research thrust s for the manufacture of mini or micro mechanical objects. This articl e reports the use of FIB in three distinct applications in microfabric ation: prototype structures, micron-sized machine tools and microsurgi cal manipulators, and ion milling of three dimensional features. Examp les of each of these applications are given with the FIB component ide ntified as the enabling or critical component in the technology. The p ossibility of using FIB milling as part of a production method for mic ron-sized machine tools is discussed, and the mass production conseque nces of molds fabricated by three dimensional ion beam milling is also considered. The mathematical procedure and programming steps needed t o accurately control FIB three dimensional milling are outlined. (C) 1 998 American Vacuum Society.