TRANSMISSION ELECTRON-MICROSCOPY OBSERVATION OF THIN FOIL SPECIMENS PREPARED BY MEANS OF A FOCUSED ION-BEAM

Authors
SAKA H
Citation
H. Saka, TRANSMISSION ELECTRON-MICROSCOPY OBSERVATION OF THIN FOIL SPECIMENS PREPARED BY MEANS OF A FOCUSED ION-BEAM, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(4), 1998, pp. 2522-2527
Citations number
16
Categorie Soggetti
Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
16
Issue
4
Year of publication
1998
Pages
2522 - 2527
Database
ISI
SICI code
1071-1023(1998)16:4<2522:TEOOTF>2.0.ZU;2-L
Abstract
Recent development in the application of a focused ion beam to prepara tion of thin foil specimens for transmission electron microscopy obser vation has been reviewed. It has been shown that this technique is ver y powerful for characterization of a variety of industrial materials. (C) 1998 American Vacuum Society.