GROWTH-CHARACTERISTICS OF CDZNTE LAYERS GROWN BY METALORGANIC VAPOR-PHASE EPITAXY USING DIMETHYLZINC, DIMETHYLCADMIUM, DIETHYLTELLURIDE, AND DIMETHYLTELLURIDE AS PRECURSORS

Citation
K. Yasuda et al., GROWTH-CHARACTERISTICS OF CDZNTE LAYERS GROWN BY METALORGANIC VAPOR-PHASE EPITAXY USING DIMETHYLZINC, DIMETHYLCADMIUM, DIETHYLTELLURIDE, AND DIMETHYLTELLURIDE AS PRECURSORS, Journal of electronic materials, 27(8), 1998, pp. 948-953
Citations number
20
Categorie Soggetti
Engineering, Eletrical & Electronic","Material Science
ISSN journal
03615235
Volume
27
Issue
8
Year of publication
1998
Pages
948 - 953
Database
ISI
SICI code
0361-5235(1998)27:8<948:GOCLGB>2.0.ZU;2-Q
Abstract
Growth characteristics of (100)-oriented CdZnTe layers grown by atmosp heric pressure metalorganic vapor phase epitaxy have been studied usin g dimethylzinc (DMZn), dimethylcadmium (DMCd), diethyltelluride (DETe) ,and dimethyltelluride (DMTe) as precursors. Variations of Zn composit ion and layer growth rate were examined by changing the DMZn supply ra tio, defined as DMZn/(DMCd+DMZn), where the precursors are expressed i n appropriate units of now rate, from 0 (no DMZn) to 1.0 (no DMCd), wh ile keeping the total group II supply rate constant. The growth rate o f CdZnTe layers was found to decrease monotonically with increase of t he DMZn supply ratio. On the other hand, the Zn composition x of grown layers increased gradually up to x = 0.04 with increase of the DMZn s upply ratio from 0 to 0.8, beyond which the Zn composition increased a bruptly to ZnTe. The abrupt transition of Zn composition was suppresse d by increasing the VI/II ratio. The growth mechanism of CdZnTe layers was studied based on the observed growth characteristics of CdTe and ZnTe. A higher desorption rate from the growth surface for Zn species than for Cd species, and a higher rate of CdTe formation than ZnTe for mation are believed to cause the observed growth characteristics. CdZn Te layers with high crystal quality were grown in a wide range of Zn c ompositions. The full-width at half-maximum values for x-ray double-cr ystal rocking-curve measurements were lower than 320 are-sec for x < 0 .3 and x > 0.75.