The subband structure of p-type delta-doping wells in Si is calculated
within self-consistent six-component envelope function theory, taking
the heavy hole, Light hole and spin-orbit split bulk bands into accou
nt. The subband dispersion shows a pronounced anticrossing behavior, b
eing enhanced by the small splitting between heavy and light hole leve
ls and the strong subband anisotropy parallel to the doping layers. Fo
r sheet doping concentrations above 10(13) cm(-2), subbands derived fr
om the spin-orbit split band compete with heavy and light hole subband
s. A comparison with experimental results shows good agreement. (C) 19
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