USING FEM MODELS FOR THE GENERATION OF MICROCOMPONENT DESCRIPTIONS ONVARIOUS LEVELS OF INTEREST

The design of microsystems with components from heterogeneous domains requires a division of work between specialists for system aspects, co mponent design, fabrication and process related questions. In this pap er a set of CAD-tools which serve as interface between different level s of abstraction is presented. These tools allow a top-down design flo w and an easy and fast adaptation of parametric microcomponents toward s personal requirements. This concept is demonstrated using an acceler ation sensor. (C) 1998 Elsevier Science B.V. All rights reserved.