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The design of microsystems with components from heterogeneous domains
requires a division of work between specialists for system aspects, co
mponent design, fabrication and process related questions. In this pap
er a set of CAD-tools which serve as interface between different level
s of abstraction is presented. These tools allow a top-down design flo
w and an easy and fast adaptation of parametric microcomponents toward
s personal requirements. This concept is demonstrated using an acceler
ation sensor. (C) 1998 Elsevier Science B.V. All rights reserved.