ARSENIC CAP LAYER DESORPTION AND THE FORMATION OF GAAS(001)C(4X4) SURFACES

Citation
I. Karpov et al., ARSENIC CAP LAYER DESORPTION AND THE FORMATION OF GAAS(001)C(4X4) SURFACES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(5), 1995, pp. 2041-2048
Citations number
39
Categorie Soggetti
Physics, Applied
ISSN journal
10711023
Volume
13
Issue
5
Year of publication
1995
Pages
2041 - 2048
Database
ISI
SICI code
1071-1023(1995)13:5<2041:ACLDAT>2.0.ZU;2-V
Abstract
GaAs(001)c(4X4) surfaces were obtained in the 380-450 degrees C temper ature range by thermal desorption of As cap layers from substrates pre pared by molecular beam epitaxy. Although reflection high-energy elect ron diffraction patterns showed little change in the temperature range explored, in situ scanning tunneling microscopy and Auger spectroscop y, complemented by ex situ atomic force microscopy, indicate that in t he lower-temperature range examined up to 11%-12% of the surface may s till be occupied by adsorbed As in the form bf wires and particles pre ferentially oriented along[100] directions. (C) 1995 American Vacuum S ociety.