I. Karpov et al., ARSENIC CAP LAYER DESORPTION AND THE FORMATION OF GAAS(001)C(4X4) SURFACES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(5), 1995, pp. 2041-2048
GaAs(001)c(4X4) surfaces were obtained in the 380-450 degrees C temper
ature range by thermal desorption of As cap layers from substrates pre
pared by molecular beam epitaxy. Although reflection high-energy elect
ron diffraction patterns showed little change in the temperature range
explored, in situ scanning tunneling microscopy and Auger spectroscop
y, complemented by ex situ atomic force microscopy, indicate that in t
he lower-temperature range examined up to 11%-12% of the surface may s
till be occupied by adsorbed As in the form bf wires and particles pre
ferentially oriented along[100] directions. (C) 1995 American Vacuum S
ociety.