A NOVEL DESIGN FOR A SMALL RETRACTABLE CYLINDRICAL MIRROR ANALYZER

Authors
MCLLROY DN DOWBEN PA KNOP A RUHL E
Citation
Dn. Mcllroy et al., A NOVEL DESIGN FOR A SMALL RETRACTABLE CYLINDRICAL MIRROR ANALYZER, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(5), 1995, pp. 2142-2144
Citations number
9
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
5
Year of publication
1995
Pages
2142 - 2144
Database
ISI
SICI code
1071-1023(1995)13:5<2142:ANDFAS>2.0.ZU;2-1
Abstract
In this paper we will review the performance of a ''miniature'' single pass cylindrical mirror analyzer (CMA) which we have used successfull y in a variety of experiments. The underlying premise behind this CMA design was to minimize spatial requirements while maintaining an accep table level of instrumental resolution. While we are presenting the re sults of a single pass cylindrical mirror analyzer, improvements on th e present design, such as going to a double pass design, will undoubte dly improve the instrumental resolution. (C) 1995 American Vacuum Soci ety.