REVERSIBLE AND IRREVERSIBLE CONTROL OF OPTICAL-PROPERTIES OF POROUS SILICON SUPERLATTICES BY THERMAL-OXIDATION, VAPOR ADSORPTION, AND LIQUID PENETRATION

Authors
ZANGOOIE S JANSSON R ARWIN H
Citation
S. Zangooie et al., REVERSIBLE AND IRREVERSIBLE CONTROL OF OPTICAL-PROPERTIES OF POROUS SILICON SUPERLATTICES BY THERMAL-OXIDATION, VAPOR ADSORPTION, AND LIQUID PENETRATION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(5), 1998, pp. 2901-2912
Citations number
47
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
16
Issue
5
Year of publication
1998
Pages
2901 - 2912
Database
ISI
SICI code
0734-2101(1998)16:5<2901:RAICOO>2.0.ZU;2-R
Abstract
Optical properties of porous silicon superlattices are investigated us ing variable angle spectroscopic ellipsometry. Different phenomena suc h as in-depth inhomogeneities and interface transition regions are res olved and studied using various optical models. The optical properties of the samples are modified irreversibly by thermal oxidation yieldin g a blueshift of the reflectance. A reversible redshift of the spectra is obtained by vapor adsorption and liquid penetration into the super lattice. Moreover, existence of different specific internal surface ar eas and pore size distributions in the low and high index sublayers of the material is proposed. (C) 1998 American Vacuum Society. [S0734-21 01(98)02505-6].