NONCONTACT METHOD FOR MEASURING COEFFICIENT OF LINEAR THERMAL-EXPANSION OF THIN-FILMS

We measured the coefficient of linear thermal expansion of ZnSe thin f ilms with a temperature regulated spectroscopic ellipsometer. The chan ge in the film thickness was found to be a quadratic function of tempe rature whereas the coefficient of linear thermal expansion varied line arly in the temperature range between 295 and 413 K. Tt While spectros copic ellipsometry is recognized as a measurement technique to determi ne thin film optical constants and him thickness, the present work exp ands upon this technique to measure temperature induced dimensional ch ange in the Angstrom range. (C) 1998 American Vacuum Society. [S0734-2 101 (98)02605-0].