CALCULATION OF LATERAL DISTRIBUTION OF LATTICE-CONSTANT FOR HORIZONTAL MOVPE GROWN QUATERNARY ALLOYS

Lateral compositional inhomogeneity for ternary and quaternary alloys is a general problem in horizontal MOVPE system. According to the mode l developed by Xu et al. in previous work, a calculation method for an alysing lateral homogeneity of lattice constant in horizontal MOVPE gr own quaternary alloys was presented. Based on the conclusions of this model several experiments were performed. The experimental results dem onstrated that this model has properly described the compositional uni formity of MOVPE grown ternary and quaternary alloys. (C) 1998 Elsevie r Science B.V. All rights reserved.