K. Pond et al., SCANNING-TUNNELING-MICROSCOPY OF FLAT AND VICINAL MOLECULAR-BEAM EPITAXY-GROWN GAAS(001)-(2X4) SURFACES - THE EFFECT OF GROWTH-RATE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(4), 1993, pp. 1374-1378
Scanning tunneling microscopy (STM) has been used to investigate the e
ffect of the deposition rate on the resulting morphology of nominally
flat and vicinal GaAs(001)-(2 X 4) surfaces grown by molecular-beam ep
itaxy. On the nominally flat surfaces, low deposition rates are found
to create smooth surfaces and lead to anisotropic islanding with an A-
type step (Ga terminated, parallel to the [110BAR] direction) to B-typ
e step (As terminated, parallel to the [110] direction) average aspect
ratio which is larger than that produced by standard deposition rates
. The results suggest that the increase in the island anisotropy at lo
w growth rates reflects the energetics of the step edges. In contrast,
the growth rates investigated are found not to have any obvious effec
t on the resultant morphology of the 2-degrees A-type vicinal surfaces
. In particular, no islanding on the terraces is observed at either de
position rate. However, detailed statistical analyses of the STM image
s indicate that there is a larger spread in the terrace width and a gr
eater probability for forming kinks with increasing growth rate. This
observation suggests that the probability of a Ga adatom incorporating
at an A-type step (rather than at a B-type kink) is greater for stand
ard growth rates than for low growth rates.