Mw. Wang et al., X-RAY PHOTOELECTRON-SPECTROSCOPY INVESTIGATION OF THE MIXED ANION GASB INAS HETEROINTERFACE/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(4), 1993, pp. 1418-1422
X-ray photoelectron spectroscopy has been used to measure levels of an
ion cross-incorporation and to study interface formation for the mixed
anion GaSb/InAs heterojunction. Anion cross-incorporation was measure
d m 20 angstrom thick GaSb layers grown on InAs, and 20 angstrom thick
InAs layers grown on GaSb for cracked and uncracked sources. It was f
ound that significantly less anion cross-incorporation occurs m struct
ures grown with cracked sources. Interface formation was investigated
by studying Sb soaks of InAs surfaces and As soaks of GaSb surfaces as
a function of cracker power and soak time. Exchange of the group V su
rface atoms was found to be an increasing function of both cracker pow
er and soak time. We find that further optimization of current growth
parameters may be possible by modifying the soak time used at interfac
es.