X-RAY PHOTOELECTRON-SPECTROSCOPY INVESTIGATION OF THE MIXED ANION GASB INAS HETEROINTERFACE/

Citation
Mw. Wang et al., X-RAY PHOTOELECTRON-SPECTROSCOPY INVESTIGATION OF THE MIXED ANION GASB INAS HETEROINTERFACE/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(4), 1993, pp. 1418-1422
Citations number
16
Categorie Soggetti
Physics, Applied
ISSN journal
10711023
Volume
11
Issue
4
Year of publication
1993
Pages
1418 - 1422
Database
ISI
SICI code
1071-1023(1993)11:4<1418:XPIOTM>2.0.ZU;2-R
Abstract
X-ray photoelectron spectroscopy has been used to measure levels of an ion cross-incorporation and to study interface formation for the mixed anion GaSb/InAs heterojunction. Anion cross-incorporation was measure d m 20 angstrom thick GaSb layers grown on InAs, and 20 angstrom thick InAs layers grown on GaSb for cracked and uncracked sources. It was f ound that significantly less anion cross-incorporation occurs m struct ures grown with cracked sources. Interface formation was investigated by studying Sb soaks of InAs surfaces and As soaks of GaSb surfaces as a function of cracker power and soak time. Exchange of the group V su rface atoms was found to be an increasing function of both cracker pow er and soak time. We find that further optimization of current growth parameters may be possible by modifying the soak time used at interfac es.