S. Gwo et al., SCANNING-TUNNELING-MICROSCOPY OF DOPING AND COMPOSITIONAL III-V HOMOSTRUCTURES AND HETEROSTRUCTURES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(4), 1993, pp. 1509-1513
Scanning tunneling microscopy (STM) was used to study the (110) cross-
sectional surfaces of molecular-beam epitaxially grown III-V homo- and
heterostructures, which include GaAs multiple p-n junctions, (InGa)As
/GaAs strained-layer multiple quantum wells, and (AlGa)As/GaAs heteroj
unctions. Both doping and compositional effects can be resolved by the
topographic contrasts of constant-current STM images. The samples wer
e prepared by either cleaving in ultrahigh vacuum or cleaving ex situ
followed by sulfide [(NH4)2S] passivation. Sulfide passivated samples
have been found to be advantageous for the measurements of scanning tu
nneling spectroscopy.