LOWER-DIMENSIONAL QUANTUM STRUCTURES BY SELECTIVE GROWTH AND GAS-PHASE NUCLEATION

Citation
Kj. Vahala et al., LOWER-DIMENSIONAL QUANTUM STRUCTURES BY SELECTIVE GROWTH AND GAS-PHASE NUCLEATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(4), 1993, pp. 1660-1666
Citations number
36
Categorie Soggetti
Physics, Applied
ISSN journal
10711023
Volume
11
Issue
4
Year of publication
1993
Pages
1660 - 1666
Database
ISI
SICI code
1071-1023(1993)11:4<1660:LQSBSG>2.0.ZU;2-1
Abstract
There is increasing interest in the potential application of quantum d ots and quantum wires to various solid state devices. In this article, the physics of lower-dimensional quantum structures will be reviewed with emphasis on applications. In addition, two fabrication approaches under investigation at Caltech will be discussed. The first is based on selective nucleation of III-V semiconductors on a patterned host su bstrate and the second is gas-phase nucleation of III-V clusters. Rece nt results on formation of nanocrystal GaAs and silicon clusters in th e gas phase are presented.