Kj. Vahala et al., LOWER-DIMENSIONAL QUANTUM STRUCTURES BY SELECTIVE GROWTH AND GAS-PHASE NUCLEATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(4), 1993, pp. 1660-1666
There is increasing interest in the potential application of quantum d
ots and quantum wires to various solid state devices. In this article,
the physics of lower-dimensional quantum structures will be reviewed
with emphasis on applications. In addition, two fabrication approaches
under investigation at Caltech will be discussed. The first is based
on selective nucleation of III-V semiconductors on a patterned host su
bstrate and the second is gas-phase nucleation of III-V clusters. Rece
nt results on formation of nanocrystal GaAs and silicon clusters in th
e gas phase are presented.