EFFECT OF DIAMOND-LIKE CARBON COATING ON THE EMISSION CHARACTERISTICSOF MOLYBDENUM FIELD EMITTER ARRAYS

Authors
JUNG JH JU BK KIM H LEE YH CHUNG SJ JANG J OH MH
Citation
Jh. Jung et al., EFFECT OF DIAMOND-LIKE CARBON COATING ON THE EMISSION CHARACTERISTICSOF MOLYBDENUM FIELD EMITTER ARRAYS, I.E.E.E. transactions on electron devices, 45(10), 1998, pp. 2232-2237
Citations number
15
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied
Journal title
I.E.E.E. transactions on electron devices → ACNP
ISSN journal
00189383
Volume
45
Issue
10
Year of publication
1998
Pages
2232 - 2237
Database
ISI
SICI code
0018-9383(1998)45:10<2232:EODCCO>2.0.ZU;2-Y
Abstract
We have studied the electron emission characteristics of Mo field emit ter arrays (FEA's) using a diamond-like carbon (DLC) film deposited by a layer-by-layer technique using plasma enhanced chemical vapor depos ition. The turn-on voltage was lowered from 55 to 30 V by a 20-nm thic k hydrogen-free DLC coating and maximum emission current was increased from 166 to 831 mu A. Also the gate voltage required to get the anode current of 0.1 (mu A/emitter) decreases from 77 to 48 V. Furthermore, the emission current from DLC coated Mo FEA's is more stable than tha t of noncoated Mo FEA's.