ROLE OF LINE-BEAM ON THE REMOVAL OF PARTICULATE CONTAMINATIONS FROM SOLID-SURFACES BY PULSED-LASER

In this paper, we have examined the particulate removal efficiency of a laser from solid surfaces. The silicon wafers were contaminated with 0.05 to 0.5 mu m sized alumina particles. The silicon wafers with uni form surface-distribution of alumina particles were subjected to pulse d laser beams at varying conditions. The results obtained have shown t hat line beam lasers can remove submicron particles more efficiently f rom solid surfaces. The mechanism responsible for higher particulate r emoval-efficiency of Line beam laser has also been discussed.