CONNECTING SMALL-ANGLE DIFFRACTION WITH REAL-SPACE IMAGES BY QUANTITATIVE TRANSMISSION ELECTRON-MICROSCOPY OF AMORPHOUS THIN-FILMS

We have explored quantitative methods to study projected density fluct uations on the scale 0.5-2 nm in amorphous thin-films using weak phase object transmission electron microscopy. A useful method includes qua ntitative analysis of electron images and their Fourier amplitudes, es sentially combining small-angle scattering analysis and high-resolutio n imaging from the same microscopic region. By comparing the Fourier s pectra of differently prepared SiO2 specimens, we show that clear diff erences between similar-looking samples can be detected quantitatively , and defect sizes and densities can be measured. Further development of this technique may hold significant value for researchers working t o understand small-angle diffraction and for those investigating the p erformance of microelectronic thin oxides. (C) 1998 Elsevier Science B .V. All rights reserved.