A NEW ADAPTIVE AMPLIFIER FOR BIASED ELECTRON-BEAM-INDUCED CURRENT APPLICATIONS

Authors
CIAPPA M MALBERTI P FURCAS P VANZI P
Citation
M. Ciappa et al., A NEW ADAPTIVE AMPLIFIER FOR BIASED ELECTRON-BEAM-INDUCED CURRENT APPLICATIONS, Microelectronics and reliability, 38(6-8), 1998, pp. 889-893
Citations number
6
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Microelectronics and reliability → ACNP
ISSN journal
00262714
Volume
38
Issue
6-8
Year of publication
1998
Pages
889 - 893
Database
ISI
SICI code
0026-2714(1998)38:6-8<889:ANAAFB>2.0.ZU;2-O
Abstract
A novel amplifier for Electron Beam Induced Current (EBIC) mapping is, presented which enables sample polarization and which provides at the same time goad characteristics in terms of sensitivity, input bandwid th and noise-immunity. The proposed circuitry includes an adaptive sel f-compensation of the DC level due to the leakage currents. (C) 1998 E lsevier Science Ltd. All rights reserved.