DETAILED INVESTIGATION OF SEM-RESULTS BY TEM AT ONE SAMPLE USING FIB-TECHNIQUE

We show how different analytical methods were applied to one sample to get maximum information. By SEM strings of an unknown material in the centre of the array, where bitline shorts appeared, were detected. Fo r the identification of the material and the technology step which cau sed the fail the modification from the compact SEM-sample to a thin fo il for TEM-analysis was necessary. The most critical steps were execut ed by FIB. Using analytical TEM the origins of the shorts were determi ned as different materials. (C) 1998 Elsevier Science Ltd. All rights reserved.