JUNCTION DELINEATION AND EBIC ON FIB CROSS-SECTION

Authors
PEREZ G COURTADE F BENTEO B GAUFFIER JL KWANG JL
Citation
G. Perez et al., JUNCTION DELINEATION AND EBIC ON FIB CROSS-SECTION, Microelectronics and reliability, 38(6-8), 1998, pp. 907-912
Citations number
8
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Microelectronics and reliability → ACNP
ISSN journal
00262714
Volume
38
Issue
6-8
Year of publication
1998
Pages
907 - 912
Database
ISI
SICI code
0026-2714(1998)38:6-8<907:JDAEOF>2.0.ZU;2-0
Abstract
This paper presents a sample preparation study on a FIB based X-sectio n. It shows that wet etching is a simple and reproducible solution for the decoration of both implanted and deposited layers. The methodolog y is applicable on bare or packaged dice. Results with EBIC on FIB cro ss-sections were arise obtained. A specific double FIB box method was developed and characterized to improve spatial resolution of EBIC. (C) 1998 Elsevier Science Ltd. All rights reserved.