LOW-FREQUENCY NOISE-ANALYSIS AS A DIAGNOSTIC-TOOL TO ASSESS THE QUALITY OF 0.25-MU-M TI-SILICIDED POLY LINES

In this paper, de and low frequency noise measurement results on Ti-si licided poly lines are presented and analysed. Besides Raman scatterin g [1], low frequency noise analysis gives additional information on th e presence and the spatial distribution of the high resistive C49 phas e in the silicide line. The low frequency noise is strongly dependent on whether or not the distribution of the C49 phase is uniform or spot ted-like. The experimental results agree with our model for a uniform C49 phase distribution over the silicided line. A spotted-like distrib ution of the C49 phase, which causes non-uniform current densities, ca n not explain the observed noise behaviour. (C) 1998 Elsevier Science Ltd. All rights reserved.