E. Martina et al., A NEW METHOD OR TEMPERATURE MAPPING ON GAAS FIELD-EFFECT TRANSISTORS, Microelectronics and reliability, 38(6-8), 1998, pp. 1245-1250
In this paper, a method is described, how to apply the technique of sp
atially resolved photoluminescence (PL) spectroscopy for the measureme
nt of the local channel temperature in GsAs-based field effect transis
tors. This spectroscopic technique uses a focused laser beam which sca
ns directly the surface of a chip inside its package. The temperature
is deduced from the corresponding wavelength shift of the PL peak. In
the case of a typical heterostructure-based transistor (like the pseud
omorphic high electron mobility transistors studied here) a spatial re
solution of 1 mu m and a temperature resolution of +/- 1 degrees C is
demonstrated. (C) 1998 Elsevier Science Ltd. All rights reserved.