W. Lei et al., SIMULATION STUDY ON PERFORMANCE OF FIELD EMITTER ARRAY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(5), 1998, pp. 2881-2886
An improved finite difference method is used to study the field emitte
r arrays in both diode and triode modes. In the simulation, the bounda
ry of the emitter can be fitted with irregular meshes. The emission pe
rformance of the emitter array is analyzed in this article. Simulation
results show that the electric field at tips in the emitter array is
not uniform. The emission currents from tips are also different. Due t
o the influence of the interaction and fringe field, the emission curr
ents from tips near the edge of the array are larger than that from ti
ps on the center part of the array. However, the presence of the gate
can reduce the interaction between neighboring tips in the triode stru
cture. Thus, it is possible to achieve a higher current density in the
triode mode. (C) 1998 American Vacuum Society.