PRODUCTION OF A DENSE METAL-ION STREAM FOR ION COATING BY A PULSED VACUUM-ARC IN A STRONG MAGNETIC-FIELD

Authors
NAKAGAWA Y ITAMI M
Citation
Y. Nakagawa et M. Itami, PRODUCTION OF A DENSE METAL-ION STREAM FOR ION COATING BY A PULSED VACUUM-ARC IN A STRONG MAGNETIC-FIELD, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 11(5), 1993, pp. 2472-2476
Citations number
12
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
11
Issue
5
Year of publication
1993
Pages
2472 - 2476
Database
ISI
SICI code
0734-2101(1993)11:5<2472:POADMS>2.0.ZU;2-M
Abstract
A dense metal-ion stream (approximately 1 X 10(18)/shot) was produced by a high-current, long-pulse vacuum arc (approximately 2 kA, approxim ately 25 ms) in a strong magnetic field. The ion stream was transporte d 40 cm by the magnetic field to a substrate and then deposited on it. Fast film formation (approximately 200 angstrom/shot), such as TiN an d TiC films, was achieved by this device using a Ti electrode discharg e in N2 or CH4 gas.