INDIUM DOPING OF SILICON USING AN EVAPORATED INDIUM FILM SOURCE

Authors
KOLLURI SV CHANDORKAR AN DHAUL A
Citation
Sv. Kolluri et al., INDIUM DOPING OF SILICON USING AN EVAPORATED INDIUM FILM SOURCE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 11(5), 1993, pp. 2849-2850
Citations number
9
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
11
Issue
5
Year of publication
1993
Pages
2849 - 2850
Database
ISI
SICI code
0734-2101(1993)11:5<2849:IDOSUA>2.0.ZU;2-A