Mw. Cole et al., THE INFLUENCE OF MICROSTRUCTURE ON THE ELECTRONIC-PROPERTIES OF THIN-FILMS OF BARIUM STRONTIUM TITANIUM-OXIDE COMPOSITES, Integrated ferroelectrics (Print), 21(1-4), 1998, pp. 469-473
Microstructural and electrical properties were investigated for barium
strontium titanium oxide (BSTO) magnesium oxide doped (0 to 10 wt. %)
thin films deposited by the pulsed laser deposition (PLD) method on P
t/TiOx/SiO2/Si substrates. The dielectric properties were found to be
strongly dependent on composition and microstructure. In cross-section
, all films exhibited a columnar polycrystalline microstructure with v
ertical orientation deviations dictated by the surface roughness of th
e Pt electrode. A uniform granular microstructure was observed for all
films in plan view. The dielectric constant, loss tangent and grain s
ize decreased with increasing MgO concentration.