MASS-SPECTROSCOPY OF RECOILED ION INVESTIGATION OF ELECTRODE SEGREGATION EFFECTS DURING THE INITIAL-STAGES OF SRBI2TA2O9 FILM GROWTH

Authors
IM J KRAUSS AR AUCIELLO O GRUEN DM CHANG RPH
Citation
J. Im et al., MASS-SPECTROSCOPY OF RECOILED ION INVESTIGATION OF ELECTRODE SEGREGATION EFFECTS DURING THE INITIAL-STAGES OF SRBI2TA2O9 FILM GROWTH, Integrated ferroelectrics (Print), 22(1-4), 1998, pp. 743-755
Citations number
15
Categorie Soggetti
Physics, Condensed Matter","Engineering, Eletrical & Electronic","Physics, Applied
Journal title
Integrated ferroelectrics (Print) → ACNP
ISSN journal
10584587
Volume
22
Issue
1-4
Year of publication
1998
Pages
743 - 755
Database
ISI
SICI code
1058-4587(1998)22:1-4<743:MORIIO>2.0.ZU;2-#
Abstract
The thermodynamic stability of Pt/Ti/SiO2/Si, Pt/TiO2/SiO2/Si, Pt/Ta/S iO2/Si, Ir/SiO2/Si, and RuO2/SiO2/Si electrode layers has been studied using mass spectroscopy of recoiled ions (MSRI), a new technique whic h provides monolayer-specific in situ surface analysis under condition s of modest oxygen partial pressures required for oxide film growth us ing sputter-deposition. Results of the initial stages of growth of SrB i2Ta2O9 films on the various substrates listed above are presented als o. It is found that the initial growth of SrBi2Ta2O9 films strongly de pends on the composition of the bottom electrode surface, on diffusion and segregation processes, and the presence of reactive species on th e electrode surface.