MODELING OF A THIN-FILM PYROELECTRIC PIXEL - TRANSIENT RESULTS

Pyroelectric thin films are receiving increasing attention for the nex t generation of integrated room temperature uncooled IR arrays. Pixel size and NETD (net equivalent temperature difference) of 50 mu m and 0 .005 K are projected respectively. In this study, the 1-D transient re sponse of a pixel consisting of black absorber, pyroelectric, Pt, TiO2 , SiO2 and Si are performed. Thermal conduction and radiative transfer are assumed to take place across this stack and at the Si substrate-a ir interface, respectively. The effects of individual film thickness, IR chopping frequency, thermal conductivity of the thermal barrier lay er and substrate thickness on the pyroelectric response are investigat ed.