A SPHERICAL-ABERRATION-CORRECTED 200 KV TRANSMISSION ELECTRON-MICROSCOPE

A hexapole corrector system was constructed for compensation of the sp herical aberration of the objective lens of a transmission electron mi croscope. Implementing this system on a commercial 200 kV instrument w ith a held emission gun the spherical aberration correction was demons trated and an improvement of the point resolution from 0.24 nm to bett er than 0.14 nm was realized. Applying the new instrument to structure studies on Si/CoSi2 interfaces it was demonstrated that an outstandin g additional advantage of aberration correction is the substantially r educed contrast delocalization in high-resolution images. (C) 1998 Els evier Science B.V. All rights reserved.