DISPERSIVE DECAY OF POSITIVE OXIDE CHARGE AFTER HIGH-FIELD STRESS

The decay of positive oxide charge after high field stress is shown to be a dispersive response by experimental results, which is further su ppressed with increasing negative gate bias, indicating that the ''fre e electrons'' in oxide injected by FN injection have little effect on the discharging. By suitably choosing the time scale and slope scale, all the decay under different biases can be scaled into a single, unif orm curve which indicates that the decay under low field bias can be p redicted from that of high field. (C) 1998 Elsevier Science Ltd. All r ights reserved.