The electron precession technique was developed for the ab initio stru
cture determination of unknown phases. However, in this paper we have
explored the possibility of using precession to determine accurate val
ues of the Debye-Waller factor. As a test of the technique, silicon, d
iamond and chromium were studied and the results obtained compared wit
h known values determined from other techniques. The agreement was fou
nd to be excellent. The accuracy and simplicity of the technique makes
it suited to many situations where the Debye-Waller factor needs to b
e known accurately and with sub-micron spatial resolution. (C) 1998 El
sevier Science B.V. All rights reserved.