DESIGN OF AN ATOM-CLUSTER GENERATOR FOR A TRANSMISSION ELECTRON-MICROSCOPE AND IN-SITU OBSERVATION OF THE DEPOSITION PROCESS OF LARGE ATOM CLUSTERS

Authors
MORI H FUJII K KOMATSU M MIYAUCHI K
Citation
H. Mori et al., DESIGN OF AN ATOM-CLUSTER GENERATOR FOR A TRANSMISSION ELECTRON-MICROSCOPE AND IN-SITU OBSERVATION OF THE DEPOSITION PROCESS OF LARGE ATOM CLUSTERS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(4), 1994, pp. 2462-2464
Citations number
15
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
4
Year of publication
1994
Pages
2462 - 2464
Database
ISI
SICI code
1071-1023(1994)12:4<2462:DOAAGF>2.0.ZU;2-7
Abstract
An atom-cluster generator which can be set in the specimen chamber of a transmission electron microscope has been designed and constructed. The generator essentially consists of two vacuum chambers; one is the chamber for differential pumping and the other the cluster source cham ber. The former plays an essential role in keeping the column of a mic roscope in a high vacuum. The latter is kept in a gas atmosphere and n m-sized metal clusters are produced in this chamber by evaporating a m etal element from a tungsten filament. With this apparatus, preliminar y in situ deposition experiments were carried out, and it was observed that isolated gold clusters, ejected from the atom-cluster generator, landed sequentially on a substrate.