P. Chen et al., MECHANISMS OF STRAINED ISLAND FORMATION IN MOLECULAR-BEAM EPITAXY OF INAS ON GAAS(100), Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(4), 1994, pp. 2568-2573
Results of a systematic examination of InAs island formation on GaAs(1
00) as a function of deposition conditions and thickness are presented
. A non-Arrhenius dependence of the island density on substrate temper
ature and a decrease in the island density with increasing As4 Pressur
e at lower substrate temperatures is observed, indicating that current
ly popular frameworks of compound semiconductor molecular-beam epitaxi
cal growth and island formation mechanism(s) need to be enlarged. Plan
-view transmission electron microscopy (TEM) and use of the behavior o
f Moire fringes provides the island size distribution and demarcation
between coherent and incoherent islands. Photoluminescence (PL) behavi
or is shown to vary significantly with the growth conditions and to co
rrelate to the attendant structural nature revealed by TEM. The issue
of lateral quantum confinement (i.e., three-dimensional islands as qua
ntum boxes) is shown to be subtle and complex, calling for caution in
interpreting PL behavior. The results suggest that a regular array of
''quantum boxes'' made of coherently strained volumes of uniform size
may be achieved via growth on prepatterned mesas.