CDTE GAAS(100) HETEROJUNCTIONS - GROWTH MODIFICATION BY THIN SILICON INTERFACE LAYERS/

Citation
Jw. Cairns et al., CDTE GAAS(100) HETEROJUNCTIONS - GROWTH MODIFICATION BY THIN SILICON INTERFACE LAYERS/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(4), 1994, pp. 2587-2591
Citations number
18
Categorie Soggetti
Physics, Applied
ISSN journal
10711023
Volume
12
Issue
4
Year of publication
1994
Pages
2587 - 2591
Database
ISI
SICI code
1071-1023(1994)12:4<2587:CGH-GM>2.0.ZU;2-P
Abstract
The growth of CdTe epilayers on GaAs has been explored as a potential buffer layer for the fabrication of CMT/CdTe/GaAs structures on silico n substrates. CdTe layers were deposited by molecular beam epitaxy ont o GaAs(100) specimens transferred into the II-VI reactor protected by an amorphous arsenic (a-As) cap. Reflection high energy electron diffr action and double-crystal-x-ray diffraction studies show that CdTe{111 } layers grow epitaxially on both As- and Ga-rich GaAs(100) surfaces. The relatively narrow x-ray linewidths associated with the layers demo nstrate that the layers are of high structural quality. The detailed n ature of the interface between CdTe and GaAs has been studied by x-ray photoemission spectroscopy and low energy electron diffraction. It is shown that the interface is highly reactive, leading to the formation of gallium telluride, which influences the growth orientation of the CdTe layer. In an attempt to prevent such interface chemical reactions , we have explored the use of ultrathin silicon interface layers. Thus , GaAs(100) substrates were covered with 1 ML of Si before being cappe d with a-As. The samples were transferred to a surface science spectro meter, where the a-As cap was removed, producing an ordered Si-(3 x 1) /GaAs(100) surface. The subsequent growth of CdTe on the Si/GaAs(100) samples yielded well-ordered epilayers, always displaying the (100) or ientation. Possible reasons for the change in epilayer crystallographi c orientation due to the presence of the Si interlayer are considered.