Mt. Cuberes et al., PROBING THE CAF2 DENSITY-OF-STATES AT AU CAF2/N-SI(111) INTERFACES WITH PHOTOELECTRON-SPECTROSCOPY AND BALLISTIC-ELECTRON-EMISSION MICROSCOPY/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(4), 1994, pp. 2646-2652
The electronic properties, chemistry, and spatial structure of Au/CaF2
/n-Si(111) metal-insulator-semiconductor (MIS) structures, with epitax
ially grown CaF2 layers of a few monolayers (ML) thickness, have been
studied by photoelectron spectroscopy, scanning-tunneling microscopy,
and ballistic-electron emission microscopy. CaF2 films on Si are chara
cterized by flat surfaces with defect lines about 500 angstrom apart,
and band bending in Si reduces gradually with increasing CaF2 layer th
ickness. Au grows on top of the CaF2 layer in the form of hexagonal te
rraces. A Si segregation to the surface, as observed in case of the ba
re Au/Si interface, is strongly reduced by the CaF2 intralayer. Ballis
tic-electron emission microscopy shows a strong influence of the CaF2
density of states for electron transport through the intralayer. For a
4 ML thick CaF2 intralayer, the position of the CaF2 conduction-band
minimum is derived from the onset of the collector current at 3.3 V Th
e valence-band offset at the CaF2/Si interface is derived from the val
ance-band edge observed in photoelectron spectroscopy.